| PILine® Ultrasonic Linear Piezo Motor / Actuators |
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- Patented Principle Features with High Forces in Small Space
- Easy Mounting
- Max. Velocity 500 mm/s
- Acceleration up to 5 g
- Min. Incremental Motion to 0,05 µm
- Self-Locking, Push-/Pull Forces to 4 N
- No Electro-Magnetic Fields
- Integrated Actuators & Positioning Systems Also Available
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Drive-Component for Integration into Micropositioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 0.05 Micron
- Velocity to 400 mm/s
- Self-Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Cost-Effective, High-Volume-Production Drive
- Very Compact: only 8.0 mm length
- Travel Range 2 mm
- Velocity to 200 mm/s
- Self-Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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| PILine® Translation Stages |
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- Smallest Translation Stage with Closed-Loop
Linear Motor Drive and Linear Encoder
- 19 mm Travel Range
- Velocity up to 400 mm/s
- Accelerations up to 20 g
- Resolution to 0.1 Micron
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20000 h MTBF
- Vacuum Versions Available
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Range 25 mm
- Max. Velocity 400 mm/s
- Ultra-Low Profile, 15 mm
- Direct Metrology Linear Encoder with 0.1 µm Resolution
- High Guiding Accuracy with Crossed Roller Bearings
- Compact XY Combinations
- Piezo Linear Motor with 6 N Drive Force
- Self Locking at Rest
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Smallest Translation Stage with High-Speed
Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7
hPa
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Max. Velocity 350 mm/s
- Low Profile: Only 21 mm Height
- Compact XY Combination Possible
- Up to 6 N Force Generation
- Direct Metrology Linear Encoder, 0.1 µm Resolution
- Travel Ranges 25 and 50 mm
- Excellent Guiding Accuracy Through Crossed Roller Bearings
- PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
- Self-Locking at Rest
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
- 25 x 25 mm Travel Ranges
- Integrated Linear Encoders with 0.1 µm Resolution
- Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
- Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
- Self-Locking at Rest
- Compatible with PI Piezo Nanopositioning / Scanning Stages
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Optimized for PILine® Ultrasonic Piezo Linear Motors
- High-Bandwidth Encoder Inputs Allow High Speed and Resolution
- PID Servo-Control with Dynamic Parameter Switching
- Integrated Piezo Motor Power Driver
- USB, RS-232 and Analog Interfaces (e.g. for Joystick)
- 4 + 4 Programmable TTL-I/Os for Flexible Automation
- Data Recorder
- Daisy-Chain Networking for up to 16 Axes
- Powerful Macro Programming Language, e.g. for Stand-Alone Operation
- Extensive Software Support, LabVIEW, DLL, ...
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Product Description | Specs / Drawings | Ordering Info | PDF
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- For PILine® Ultrasonic OEM Motors and Positioners
- Accepts Analog Drive Signal from Standard Controller
- Available as Cost-Effective OEM board and Plug-and-Play Desktop Unit
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Product Description | Specs / Drawings | Ordering Info | PDF
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| NEXLINE® / NEXACT® Nanopositioning Drives |
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- 20 mm Standard Travel Range
- Compact and Cost-Effective Design
- 0.03 nm Resolution
- To 10 N Push/Pull Force
- Low Operating Voltage
- Self Locking, with no Heat Dissipation, Nanometer Stability
- Non-Magnetic and Vacuum-Compatible Working Principle
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Winner of the SEMI Technology Innovation
Showcase Award
- 5 mm Travel Range
- <0.1 Nanometer Resolution (Open-Loop)
- Active Force Generation to 50 N
- >80 N Holding Force
Self-Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Range 20 mm
- Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
- Up to 800 N Holding Force
- Self-Locking at Rest Non-Magnetic and Vacuum-Compatible
- Working Principle Cleanroom Compatible
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Product Description | Specs / Drawings | Ordering Info | PDF
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- For NEXACT® Drives and Positioning Systems
- Complete System with Controller, Integrated Power Amplifiers and Software
- Open-Loop Operation, or Closed-Loop with Linear Encoder
- High Performance at Low Cost
- Daisy-Chain Networking for Multi-Axis Operation
- Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
- I/O for Automation, Joystick for Manual Operation
- Parameter Changes On-the-Fly
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Special Control Algorithms for NEXLINE® Nanopositioning Linear Drives
- 32-Bit Digital Filters
- 24-Bit DAC Resolution
- Fully Programmable Low-Pass and Notch Filters
- Non-Volatile User Settings and Last-Position Data
- PI General Command Set Compatible
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Product Description | Specs / Drawings | Ordering Info | PDF
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